DSpace at KIST: Effects of leveler on the trench filling during damascene copper plating

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DC Field	Value	Language
dc.contributor.author	이유용	-
dc.contributor.author	박영준	-
dc.contributor.author	이재봉	-
dc.contributor.author	조병원	-
dc.date.accessioned	2024-01-21T10:11:22Z	-
dc.date.available	2024-01-21T10:11:22Z	-
dc.date.created	2022-01-10	-
dc.date.issued	2002-08	-
dc.identifier.issn	1229-1935	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/139314	-
dc.title	Effects of leveler on the trench filling during damascene copper plating	-
dc.title.alternative	전해전착시 상감 구리 배선의 충전에 미치는 레벨러의 효과	-
dc.type	Article	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	Journal of the Korean Electrochemical Society = 전기화학회지, v.5, no.3, pp.153 - 158	-
dc.citation.title	Journal of the Korean Electrochemical Society = 전기화학회지	-
dc.citation.volume	5	-
dc.citation.number	3	-
dc.citation.startPage	153	-
dc.citation.endPage	158	-
dc.subject.keywordAuthor	electroplating	-
dc.subject.keywordAuthor	leveler	-
dc.subject.keywordAuthor	damascene	-
dc.subject.keywordAuthor	void	-
dc.subject.keywordAuthor	superfilling	-

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