DSpace at KIST: 전해전착시 상감 구리 배선의 충전에 미치는 전류파형의 효과

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DC Field	Value	Language
dc.contributor.author	李유鏞	-
dc.contributor.author	李在峰	-
dc.contributor.author	趙炳源	-
dc.contributor.author	朴榮俊	-
dc.date.accessioned	2024-01-21T10:40:28Z	-
dc.date.available	2024-01-21T10:40:28Z	-
dc.date.created	2021-09-06	-
dc.date.issued	2002-05	-
dc.identifier.issn	1738-8228	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/139569	-
dc.publisher	대한금속·재료학회	-
dc.title	전해전착시 상감 구리 배선의 충전에 미치는 전류파형의 효과	-
dc.title.alternative	Effects of Current Wave Forms on the Copper Trench Filling during Damascene Plating	-
dc.type	Article	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	대한금속·재료학회지, v.40, no.5, pp.550 - 555	-
dc.citation.title	대한금속·재료학회지	-
dc.citation.volume	40	-
dc.citation.number	5	-
dc.citation.startPage	550	-
dc.citation.endPage	555	-
dc.description.journalRegisteredClass	kci	-
dc.identifier.kciid	ART001188186	-
dc.subject.keywordAuthor	electroplating	-

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