DSpace at KISTKIST Article2002

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dc.contributor.author李유鏞-
dc.contributor.author李在峰-
dc.contributor.author趙炳源-
dc.contributor.author朴榮俊-
dc.date.accessioned2024-01-21T10:40:28Z-
dc.date.available2024-01-21T10:40:28Z-
dc.date.created2021-09-06-
dc.date.issued2002-05-
dc.identifier.issn1738-8228-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/139569-
dc.publisher대한금속·재료학회-
dc.title전해전착시 상감 구리 배선의 충전에 미치는 전류파형의 효과-
dc.title.alternativeEffects of Current Wave Forms on the Copper Trench Filling during Damascene Plating-
dc.typeArticle-
dc.description.journalClass2-
dc.identifier.bibliographicCitation대한금속·재료학회지, v.40, no.5, pp.550 - 555-
dc.citation.title대한금속·재료학회지-
dc.citation.volume40-
dc.citation.number5-
dc.citation.startPage550-
dc.citation.endPage555-
dc.description.journalRegisteredClasskci-
dc.identifier.kciidART001188186-
dc.subject.keywordAuthorelectroplating-
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KIST Article > 2002
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