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dc.contributor.author이전국-
dc.date.accessioned2024-01-21T10:43:27Z-
dc.date.available2024-01-21T10:43:27Z-
dc.date.created2022-01-10-
dc.date.issued2002-04-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/139622-
dc.titleRF MEMS 박막형 고주파 부품-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitation전자파 기술, v.13, no.2, pp.53 - 59-
dc.citation.title전자파 기술-
dc.citation.volume13-
dc.citation.number2-
dc.citation.startPage53-
dc.citation.endPage59-
dc.subject.keywordAuthorRF MEMS-
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