DSpace at KISTKIST Article2002

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dc.contributor.authorPark, HM-
dc.contributor.authorKim, YM-
dc.contributor.authorCheong, CS-
dc.contributor.authorRyu, JC-
dc.contributor.authorLee, DW-
dc.contributor.authorLee, KB-
dc.date.accessioned2024-01-21T11:00:55Z-
dc.date.available2024-01-21T11:00:55Z-
dc.date.created2021-09-04-
dc.date.issued2002-04-
dc.identifier.issn0910-6340-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/139673-
dc.languageEnglish-
dc.publisherJAPAN SOC ANALYTICAL CHEMISTRY-
dc.titleOrigin of trace organic contaminants adsorbed on the surface of silicon wafers in a manufacturing line-
dc.typeArticle-
dc.identifier.doi10.2116/analsci.18.477-
dc.description.journalClass1-
dc.identifier.bibliographicCitationANALYTICAL SCIENCES, v.18, no.4, pp.477 - 479-
dc.citation.titleANALYTICAL SCIENCES-
dc.citation.volume18-
dc.citation.number4-
dc.citation.startPage477-
dc.citation.endPage479-
dc.description.journalRegisteredClassscie-
dc.description.journalRegisteredClassscopus-
dc.identifier.wosid000174953300019-
dc.identifier.scopusid2-s2.0-0036235518-
dc.relation.journalWebOfScienceCategoryChemistry, Analytical-
dc.relation.journalResearchAreaChemistry-
dc.type.docTypeArticle-
dc.subject.keywordAuthorsilicon wafers-
dc.subject.keywordAuthoranion analysis-
dc.subject.keywordAuthorion chromatography-
dc.subject.keywordAuthorenvironmental analysis-
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KIST Article > 2002
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