Effects of deposition temperature and annealing process on PZT thin films prepared by pulsed laser deposition

Authors
김민철최지원강종윤윤석진김현재윤기현
Issue Date
2002-03
Citation
Transactions on Electrical and Electronic Materials, v.3, no.1, pp.14 - 17
Keywords
PZT thin films
URI
https://pubs.kist.re.kr/handle/201004/139718
Appears in Collections:
KIST Article > 2002
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