Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 이철승 | - |
| dc.contributor.author | 신진국 | - |
| dc.contributor.author | 김종국 | - |
| dc.contributor.author | 이광렬 | - |
| dc.contributor.author | 윤기현 | - |
| dc.date.accessioned | 2024-01-21T11:11:26Z | - |
| dc.date.available | 2024-01-21T11:11:26Z | - |
| dc.date.created | 2022-01-10 | - |
| dc.date.issued | 2002-01 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/139859 | - |
| dc.title | The control of the structure and properties of tetrahedral amorphous carbon films prepared by filtered vacuum arc | - |
| dc.title.alternative | FVA 증착법에 의해 합성된 ta-C 박막의 구조 및 물성 제어 | - |
| dc.type | Article | - |
| dc.description.journalClass | 3 | - |
| dc.identifier.bibliographicCitation | Journal of the Korean Vacuum Society = 한국진공학회, v.11, no.1, pp.8 - 15 | - |
| dc.citation.title | Journal of the Korean Vacuum Society = 한국진공학회 | - |
| dc.citation.volume | 11 | - |
| dc.citation.number | 1 | - |
| dc.citation.startPage | 8 | - |
| dc.citation.endPage | 15 | - |
| dc.subject.keywordAuthor | ta-C | - |
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- KIST Article > 2002
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