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기상화학증착 다이아몬드 자유막의 휨에 미치는 잔류응력의 영향 해석

Other Titles

Analysis of Residual Stress Effect on Out-of-Plane Deformation of Chemical-Vapor-Deposited Free-Standing Diamond Films

Authors

鄭增鉉; 白泳俊; 金喜中; 權東一

Issue Date

2002-01

Publisher

대한금속·재료학회

Citation

대한금속·재료학회지, v.40, no.1, pp.26 - 32

ISSN

1738-8228

URI

https://pubs.kist.re.kr/handle/201004/139872

Appears in Collections:

KIST Article > 2002

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