Uncooled thermopile infrared detector with chromium oxide absorption layer

Abstract

In this study, we fabricated an uncooled thermopile infrared detector with new absorption layer and estimated its output characteristics. Thermocouples of 25 pairs which are composed of boron-doped silicon and aluminum were formed and connected in series, We applied chromium oxide as a new infrared absorption material and it had an absorptivity of more than 0.7 at medium infrared range of about 10.5-13.5 mum. When infrared emitted from black body source of 313 K was irradiated on thermopile infrared detector with chromium oxide absorption layer, electro motive force of 10-15 mV could be generated. (C) 2001 Elsevier Science B.V. All rights, reserved.