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dc.contributor.author주병권-
dc.date.accessioned2024-01-21T12:02:49Z-
dc.date.available2024-01-21T12:02:49Z-
dc.date.created2022-01-10-
dc.date.issued2001-08-
dc.identifier.issn1227-917X-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/140252-
dc.titleMEMS 기술의 개요 및 전망-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitation전자부품, pp.138 - 145-
dc.citation.title전자부품-
dc.citation.startPage138-
dc.citation.endPage145-
dc.subject.keywordAuthorMEMS-
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KIST Article > 2001
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