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MEMS 기술의 개요 및 전망

Authors

주병권

Issue Date

2001-08

Citation

전자부품, pp.138 - 145

Keywords

MEMS

ISSN

1227-917X

URI

https://pubs.kist.re.kr/handle/201004/140252

Appears in Collections:

KIST Article > 2001

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