DSpace at KIST: 증착조건에 따른 극미세 다이아몬드상 카본 박막의 탄성률 변화거동

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DC Field	Value	Language
dc.contributor.author	정진원	-
dc.contributor.author	이광렬	-
dc.contributor.author	은광용	-
dc.contributor.author	고대홍	-
dc.date.accessioned	2024-01-21T12:03:02Z	-
dc.date.available	2024-01-21T12:03:02Z	-
dc.date.created	2022-01-10	-
dc.date.issued	2001-08	-
dc.identifier.issn	1225-8822	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/140256	-
dc.language	Korean	-
dc.publisher	한국진공학회	-
dc.title	증착조건에 따른 극미세 다이아몬드상 카본 박막의 탄성률 변화거동	-
dc.title.alternative	A variation of elastic modulus of very thin diamond-like carbon films with deposition condition	-
dc.type	Article	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	한국진공학회지, v.10, no.4, pp.387 - 395	-
dc.citation.title	한국진공학회지	-
dc.citation.volume	10	-
dc.citation.number	4	-
dc.citation.startPage	387	-
dc.citation.endPage	395	-
dc.description.isOpenAccess	N	-
dc.description.journalRegisteredClass	other	-
dc.subject.keywordAuthor	다이아몬드상 카본	-
dc.subject.keywordAuthor	탄성률측정	-
dc.subject.keywordAuthor	기계적 특성	-
dc.subject.keywordAuthor	박막의 구조	-

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