Norbornene-derived quinizarin dye molecules for photoimaging in polymer film based on chemical amplification

Abstract

A novel photoimaging process in thin films has been disclosed by taking advantage of photolithographic techniques based on chemical amplification concept. The key materials utilized in the process are norbornene-derived quinizarin dye molecules protected with acid-labile tert-butoxycarbonyl (t-Boc) blocking groups.