DSpace at KISTKIST Article2001

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dc.contributor.author정귀상-
dc.contributor.author강경두-
dc.contributor.author김태송-
dc.contributor.author이원재-
dc.contributor.author송재성-
dc.date.accessioned2024-01-21T12:07:38Z-
dc.date.available2024-01-21T12:07:38Z-
dc.date.created2022-01-10-
dc.date.issued2001-07-
dc.identifier.issn1229-7607-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/140337-
dc.publisher한국전기전자재료학회-
dc.titleEffects of applied bias conditions on electrochemical etch-stop characteristics-
dc.title.alternative인가 바이어스 조건이 전기화학적 식각정지 특성에 미치는 영향-
dc.typeArticle-
dc.description.journalClass2-
dc.identifier.bibliographicCitationTEEM (한국전기전자재료학회), v.14, no.4, pp.263 - 268-
dc.citation.titleTEEM (한국전기전자재료학회)-
dc.citation.volume14-
dc.citation.number4-
dc.citation.startPage263-
dc.citation.endPage268-
dc.subject.keywordAuthorSOI-
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KIST Article > 2001
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