DSpace at KIST: Fabrication of Al/PZT/RuO2 micro cantilever system and computer simulation of resonant characteristics

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DC Field	Value	Language
dc.contributor.author	유웅현	-
dc.contributor.author	정용재	-
dc.contributor.author	홍경일	-
dc.contributor.author	최덕균	-
dc.contributor.author	김태송	-
dc.date.accessioned	2024-01-21T12:07:45Z	-
dc.date.available	2024-01-21T12:07:45Z	-
dc.date.created	2022-01-10	-
dc.date.issued	2001-07	-
dc.identifier.issn	1229-7801	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/140339	-
dc.publisher	한국세라믹학회	-
dc.title	Fabrication of Al/PZT/RuO2 micro cantilever system and computer simulation of resonant characteristics	-
dc.title.alternative	Al/PZT/RuO2 마이크로 캔틸레버의 제작과 공진 특성 전산모사	-
dc.type	Article	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	한국세라믹학회지 = Journal of the Korean Ceramic Society, v.38, no.7, pp.634 - 638	-
dc.citation.title	한국세라믹학회지 = Journal of the Korean Ceramic Society	-
dc.citation.volume	38	-
dc.citation.number	7	-
dc.citation.startPage	634	-
dc.citation.endPage	638	-
dc.description.journalRegisteredClass	kci	-
dc.subject.keywordAuthor	micro cantilever	-

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