DSpace at KISTKIST Article2001

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dc.contributor.author박용욱-
dc.contributor.author신현용-
dc.contributor.author박정흠-
dc.contributor.author강종윤-
dc.contributor.author심성훈-
dc.contributor.author최지원-
dc.contributor.author윤석진-
dc.contributor.author김현재-
dc.contributor.author김경환-
dc.contributor.author최형욱-
dc.date.accessioned2024-01-21T12:12:21Z-
dc.date.available2024-01-21T12:12:21Z-
dc.date.created2022-01-10-
dc.date.issued2001-06-
dc.identifier.issn1229-7607-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/140421-
dc.publisher한국전기전자재료학회-
dc.titleA study on the ZnO thin film SAW filter by RF sputter-
dc.title.alternativeRF 마그네트론 스퍼터링에 의한 ZnO 박막 SAW 필터에 관한 연구-
dc.typeArticle-
dc.description.journalClass2-
dc.identifier.bibliographicCitationTEEM (한국전기전자재료학회), v.14, no.6, pp.481 - 486-
dc.citation.titleTEEM (한국전기전자재료학회)-
dc.citation.volume14-
dc.citation.number6-
dc.citation.startPage481-
dc.citation.endPage486-
dc.subject.keywordAuthorZnO thin film-
dc.subject.keywordAuthorpreferred orientation-
dc.subject.keywordAuthorresistivity-
dc.subject.keywordAuthorRF magnetron sputter-
dc.subject.keywordAuthorSAW-
dc.subject.keywordAuthorPropagation velocity-
dc.subject.keywordAuthorInsertion loss-
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KIST Article > 2001
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