DSpace at KIST: Fabrication and characterization of suspended-type thin film resonator using SOI-micromachining process

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DC Field	Value	Language
dc.contributor.author	주병권	-
dc.contributor.author	김현호	-
dc.contributor.author	이시형	-
dc.contributor.author	이전국	-
dc.contributor.author	김수원	-
dc.date.accessioned	2024-01-21T12:13:34Z	-
dc.date.available	2024-01-21T12:13:34Z	-
dc.date.created	2022-01-10	-
dc.date.issued	2001-06	-
dc.identifier.issn	0254-4172	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/140443	-
dc.publisher	大韓電氣學會	-
dc.title	Fabrication and characterization of suspended-type thin film resonator using SOI-micromachining process	-
dc.title.alternative	SOI 마이크로 머시닝 공정을 이용한 suspended-type 박막공진기의 제작 및 특성평가	-
dc.type	Article	-
dc.description.journalClass	3	-
dc.identifier.bibliographicCitation	전기학회논문지 = Transactions of the Korean Institute of Electrical Engneers, v.50, no.6, pp.303 - 306	-
dc.citation.title	전기학회논문지 = Transactions of the Korean Institute of Electrical Engneers	-
dc.citation.volume	50	-
dc.citation.number	6	-
dc.citation.startPage	303	-
dc.citation.endPage	306	-
dc.subject.keywordAuthor	thin film resonator	-
dc.subject.keywordAuthor	soi	-

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