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Synthesis of nanocrystalline diamond film by hot filament CVD method

Other Titles

Hot filament CVD 방법을 이용한 nanocrystalline diamond 박막 합성

Authors

강민식; 이욱성; 백영준; 채기웅; 임대순

Issue Date

2001-01

Publisher

한국세라믹학회

Citation

한국세라믹학회지 = Journal of the Korean Ceramic Society, v.38, no.1, pp.34 - 38

Keywords

hot filament CVD; pressure; nanocrystalline diamond film; microcrystalline diamond film

ISSN

1229-7801

URI

https://pubs.kist.re.kr/handle/201004/140779

Appears in Collections:

KIST Article > 2001

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