DSpace at KIST: Growing behavior of AIN thin film deposited by asymmetric bipolar pulsed dc reactive sputtering

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DC Field	Value	Language
dc.contributor.author	김주형	-
dc.contributor.author	이전국	-
dc.contributor.author	안진호	-
dc.date.accessioned	2024-01-21T13:02:07Z	-
dc.date.available	2024-01-21T13:02:07Z	-
dc.date.created	2022-01-10	-
dc.date.issued	2001-01	-
dc.identifier.issn	1229-7801	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/140785	-
dc.publisher	한국세라믹학회	-
dc.title	Growing behavior of AIN thin film deposited by asymmetric bipolar pulsed dc reactive sputtering	-
dc.title.alternative	비대칭 펄스 직류 반응성 스퍼터링으로 증착된 AIN 박막의 성장 거동	-
dc.type	Article	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	한국세라믹학회지 = Journal of the Korean Ceramic Society, v.38, no.1, pp.61 - 67	-
dc.citation.title	한국세라믹학회지 = Journal of the Korean Ceramic Society	-
dc.citation.volume	38	-
dc.citation.number	1	-
dc.citation.startPage	61	-
dc.citation.endPage	67	-
dc.description.journalRegisteredClass	kci	-
dc.subject.keywordAuthor	AlN	-
dc.subject.keywordAuthor	박막형 고주파 부품	-
dc.subject.keywordAuthor	비대칭 펄스 직류 스퍼터링	-
dc.subject.keywordAuthor	pulse frequency	-
dc.subject.keywordAuthor	duty cycle	-
dc.subject.keywordAuthor	pulsed dc	-
dc.subject.keywordAuthor	arc	-

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