Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 안광덕 | - |
| dc.date.accessioned | 2024-01-21T13:02:57Z | - |
| dc.date.available | 2024-01-21T13:02:57Z | - |
| dc.date.created | 2022-01-10 | - |
| dc.date.issued | 2001-01 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/140800 | - |
| dc.title | 반도체 제조용 포토레지스트 감광재료에 대한 전망 | - |
| dc.type | Article | - |
| dc.description.journalClass | 3 | - |
| dc.identifier.bibliographicCitation | 정밀화학, v.59, pp.13 - 20 | - |
| dc.citation.title | 정밀화학 | - |
| dc.citation.volume | 59 | - |
| dc.citation.startPage | 13 | - |
| dc.citation.endPage | 20 | - |
| dc.subject.keywordAuthor | 반도체 제조 | - |
| dc.subject.keywordAuthor | 포토레지스트 | - |
| dc.subject.keywordAuthor | 감광재료 | - |
- Appears in Collections:
- KIST Article > 2001
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