DSpace at KIST: AlN-Si Thin Film Bulk Acoustic Over-moded Resonator

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DC Field	Value	Language
dc.contributor.author	이시형	-
dc.contributor.author	이전국	-
dc.contributor.author	김상희	-
dc.contributor.author	김종헌	-
dc.contributor.author	윤기현	-
dc.date.accessioned	2024-01-21T13:06:19Z	-
dc.date.available	2024-01-21T13:06:19Z	-
dc.date.created	2022-01-10	-
dc.date.issued	2000-12	-
dc.identifier.issn	1229-7801	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/140856	-
dc.publisher	한국세라믹학회	-
dc.title	AlN-Si Thin Film Bulk Acoustic Over-moded Resonator	-
dc.title.alternative	AlN 압전 박막과 Si을 이용한 체적탄성파 Over-moded 공진기	-
dc.type	Article	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	한국세라믹학회지 = Journal of the Korean Ceramic Society, v.37, no.12, pp.1198 - 1203	-
dc.citation.title	한국세라믹학회지 = Journal of the Korean Ceramic Society	-
dc.citation.volume	37	-
dc.citation.number	12	-
dc.citation.startPage	1198	-
dc.citation.endPage	1203	-
dc.subject.keywordAuthor	over-moded resonator	-
dc.subject.keywordAuthor	RF sputtering	-
dc.subject.keywordAuthor	AIN thin film	-
dc.subject.keywordAuthor	bulk acoustic wave resonator	-
dc.subject.keywordAuthor	c-axis orientation	-
dc.subject.keywordAuthor	coupling coefficient	-

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