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AlN-Si Thin Film Bulk Acoustic Over-moded Resonator

Other Titles

AlN 압전 박막과 Si을 이용한 체적탄성파 Over-moded 공진기

Authors

이시형; 이전국; 김상희; 김종헌; 윤기현

Issue Date

2000-12

Publisher

한국세라믹학회

Citation

한국세라믹학회지 = Journal of the Korean Ceramic Society, v.37, no.12, pp.1198 - 1203

Keywords

over-moded resonator; RF sputtering; AIN thin film; bulk acoustic wave resonator; c-axis orientation; coupling coefficient

ISSN

1229-7801

URI

https://pubs.kist.re.kr/handle/201004/140856

Appears in Collections:

KIST Article > 2000

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