A study on Fabrication of Thermopile Infrared Detector

Other Titles
써모파일형 적외선 검출기의 제작에 관한 연구
Authors
이성준주병권이윤희서상희오영제김태윤김철주
Issue Date
2000-10
Publisher
한국물리학회
Citation
새물리, v.41, no.4, pp.260 - 264
Keywords
MEMS
ISSN
0374-4914
URI
https://pubs.kist.re.kr/handle/201004/141024
Appears in Collections:
KIST Article > 2000
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