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Fabrication and electrochemical characterization of all soild-state thin films micro-battery by in-situ sputtering

Other Titles

In-situ 스퍼터링을 이용한 전고상의 박막 전지의 제작 및 전기화학적 특성 평가

Authors

전은정; 윤영수; 남상철; 조원일; 신영화

Issue Date

2000-05

Publisher

한국전기화학회

Citation

한국전기화학회지 = Journal of the Korean Electrochemical Society, v.3, no.2, pp.115 - 120

Keywords

all soild-state; thin film micro-battery; vanadium oxide; in-situ; LiPON; lithium phosphorus oxynitride

ISSN

1229-1935

URI

https://pubs.kist.re.kr/handle/201004/141400

Appears in Collections:

KIST Article > 2000

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