Aligned diamond nanowhiskers

Authors
Baik, ESBaik, YJJeon, D
Issue Date
2000-04
Publisher
MATERIALS RESEARCH SOCIETY
Citation
JOURNAL OF MATERIALS RESEARCH, v.15, no.4, pp.923 - 926
Abstract
We investigated the formation of nanowhiskers by means of air plasma dry etching using diamond films of two different kinds: as-grown diamond films and films with molybdenum (Mo) deposits. As for the as-grown diamond films, nanowhiskers were found to form preferentially at grain boundaries of diamond crystals. Auger depth profile analysis of the etched films revealed a progressive enrichment by Mo toward the whisker tip, resulting from accidental sputtering of Mo substrate holder. With dry etching of diamond films with preformed Mo deposits, well-aligned whiskers 100 nm in diameter were found to form uniformly over the entire film surface with a population density of 30/mu m(2). From these findings, it follows that Mo deposits serve as micromasks for the formation of the nanowhiskers. It was; also confirmed that these whiskers showed excellent field-emission behavior.
Keywords
ELECTRON-EMISSION; FIELD-EMISSION; FILMS; ELECTRON-EMISSION; FIELD-EMISSION; FILMS; diamond nana-whiskers
ISSN
0884-2914
URI
https://pubs.kist.re.kr/handle/201004/141497
DOI
10.1557/JMR.2000.0131
Appears in Collections:
KIST Article > 2000
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