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Fabrication of piezoresistive pressure sensor based on poly-Si

Other Titles

벌크 마이크로 머시닝에 의한 다결정 실리콘 압력센서

Authors

윤영수; 임재홍; 윤석진

Issue Date

2000-01

Citation

전자부품, v.1, pp.74 - 77

Keywords

bulk micromachining

URI

https://pubs.kist.re.kr/handle/201004/141661

Appears in Collections:

KIST Article > 2000

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