Thermodynamic theory of stress distribution in epitaxial Pb(Zr, Ti)O-3 thin films

Authors
Kim, HJOh, SHJang, HM
Issue Date
1999-11-15
Publisher
AMER INST PHYSICS
Citation
APPLIED PHYSICS LETTERS, v.75, no.20, pp.3195 - 3197
Abstract
A phenomenological thermodynamic model has been developed to account for the effects of the film thickness on various properties of ferroelectric thin films. To this end, we have suitably incorporated a position-dependent stress distribution function into the elastic Gibbs function. Various physical properties can be predicted as a function of the film thickness using this modified thermodynamic formalism. A comparison of the theoretical predictions with experimental values of the average strain and the para-ferro transition temperature indicates that the tensile stress caused by the cubic-tetragonal displacive phase transition dominates over the compressive thermal stress in the epitaxially oriented tetragonal Pb(Zr, Ti)O-3 thin films. (C) 1999 American Institute of Physics. [S0003-6951(99)05546-1].
Keywords
THICKNESS DEPENDENCE; THICKNESS DEPENDENCE; thin film; stress; PZT; Thermodynami
ISSN
0003-6951
URI
https://pubs.kist.re.kr/handle/201004/141836
DOI
10.1063/1.125275
Appears in Collections:
KIST Article > Others
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