DSpace at KIST: Fabrication of CVD SiC double layer structure from the microstructural change through input gas ratio

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DC Field	Value	Language
dc.contributor.author	오정환	-
dc.contributor.author	왕채현	-
dc.contributor.author	최두진	-
dc.contributor.author	송휴섭	-
dc.date.accessioned	2024-01-21T15:04:45Z	-
dc.date.available	2024-01-21T15:04:45Z	-
dc.date.created	2022-01-10	-
dc.date.issued	1999-09	-
dc.identifier.issn	1229-7801	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/141920	-
dc.publisher	한국세라믹학회	-
dc.title	Fabrication of CVD SiC double layer structure from the microstructural change through input gas ratio	-
dc.title.alternative	입력기체비를 이용한 미세구조 변화로부터 화학증착 탄화규소의 복층구조 제작	-
dc.type	Article	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	한국세라믹학회지 = Journal of the Korean Ceramic Society, v.36, no.9, pp.937 - 945	-
dc.citation.title	한국세라믹학회지 = Journal of the Korean Ceramic Society	-
dc.citation.volume	36	-
dc.citation.number	9	-
dc.citation.startPage	937	-
dc.citation.endPage	945	-
dc.subject.keywordAuthor	SiC	-
dc.subject.keywordAuthor	microstructure	-
dc.subject.keywordAuthor	preferred orientation	-
dc.subject.keywordAuthor	double layer structure	-

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