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Fabrication of CVD SiC double layer structure from the microstructural change through input gas ratio

Other Titles

입력기체비를 이용한 미세구조 변화로부터 화학증착 탄화규소의 복층구조 제작

Authors

오정환; 왕채현; 최두진; 송휴섭

Issue Date

1999-09

Publisher

한국세라믹학회

Citation

한국세라믹학회지 = Journal of the Korean Ceramic Society, v.36, no.9, pp.937 - 945

Keywords

SiC; microstructure; preferred orientation; double layer structure

ISSN

1229-7801

URI

https://pubs.kist.re.kr/handle/201004/141920

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KIST Article > Others

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