Photoacid-generating sulfonyloxymaleimide polymers and their application to photoimaging

Abstract

Synthesis and properties of photoacid generating polymers based on four sulfonyloxymaleimides (RsOMI), N-(tosyloxy)maleimide (TsOMI), N-(methanesulfonyloxy)maleimide (MsOMI), N-(trifluoromethanesulfonyloxy)maleimide (TfOMI), and N-(10-camphorsulfonyloxy)maleimide (CsOMI) are described. The RsOMI polymers photochemically produce corresponding sulfonic acids (RsOH), TsOH, MsOH, TfOH and 10-camphorsulfonic acid (CSA) which can catalyze deprotection of the acid-labile t-BOC groups in the same polymer chains via a chemical amplification process. The photoacid generating polymers with concurrent acid-labile groups offer great potential for applications in functional transformation and photoimaging.