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Comparison of crystalline structure with room temperature photoluminescence of ZnO thin films deposited by RF magnetron sputtering

Other Titles

RF magnetron sputtering으로 제작한 ZnO 박막의 상온 발광 특성과 결정성과의 비교

Authors

유영조; 김경국; 조정; 박성주; 정형진; 최원국

Issue Date

1999-03

Citation

응용물리, v.12, no.2, pp.166 - 170

Keywords

ZnO thin film; room temperature photoluminescence; rf magnetron sputtering

ISSN

1013-7009

URI

https://pubs.kist.re.kr/handle/201004/142371

Appears in Collections:

KIST Article > Others

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