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이온빔 스퍼터링으로 제작된 다이아몬드성 카본 필름의 전계 방출 특성

Other Titles

Field emission properties of diamond-like carbon films deposited by ion beam sputtering

Authors

안상혁; 이광렬; 전동렬

Issue Date

1999-02

Publisher

한국진공학회

Citation

한국진공학회지, v.8, no.1, pp.36 - 42

Keywords

전계방출특성; 다이아몬드상 카본필름; 스퍼터링

ISSN

1225-8822

URI

https://pubs.kist.re.kr/handle/201004/142413

Appears in Collections:

KIST Article > Others

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