DSpace at KIST: The effect of initial Pd catalyst oxidation state on CH4 sensitivity of SnO2 thin film sensor

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DC Field	Value	Language
dc.contributor.author	최원국	-
dc.contributor.author	조정	-
dc.contributor.author	조준식	-
dc.contributor.author	송재훈	-
dc.contributor.author	정형진	-
dc.contributor.author	고석근	-
dc.date.accessioned	2024-01-21T16:03:26Z	-
dc.date.available	2024-01-21T16:03:26Z	-
dc.date.created	2022-01-10	-
dc.date.issued	1999-01	-
dc.identifier.issn	1226-9360	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/142464	-
dc.publisher	한국마이크로전자 및 패키징학회	-
dc.title	The effect of initial Pd catalyst oxidation state on CH4 sensitivity of SnO2 thin film sensor	-
dc.title.alternative	Pd 촉매의 부분 산화 조절을 이용한 SnO2 박막 센서의 CH4 감도 변화 연구	-
dc.type	Article	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	마이크로전자 및 패키징학회지 = Journal of Microelectronics and Packaging Society, v.6, no.2, pp.45 - 49	-
dc.citation.title	마이크로전자 및 패키징학회지 = Journal of Microelectronics and Packaging Society	-
dc.citation.volume	6	-
dc.citation.number	2	-
dc.citation.startPage	45	-
dc.citation.endPage	49	-
dc.subject.keywordAuthor	Pd catalyst	-
dc.subject.keywordAuthor	partial oxidation	-
dc.subject.keywordAuthor	chemical sensitization	-
dc.subject.keywordAuthor	electronic sensitization	-
dc.subject.keywordAuthor	x-ray phototelectron spectrosocpy	-
dc.subject.keywordAuthor	CH₄ gas sensitivity	-

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