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에너지 및 환경분야의 초소형 정밀기계

Authors

백경갑; 주병권; 김희중; 오명환

Issue Date

1999-01

Citation

전자부품 = The Electronic Parts & Components Monthly, pp.162 - 169

Keywords

MEMS

URI

https://pubs.kist.re.kr/handle/201004/142518

Appears in Collections:

KIST Article > Others

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