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dc.contributor.author백경갑-
dc.contributor.author주병권-
dc.contributor.author김희중-
dc.contributor.author오명환-
dc.date.accessioned2024-01-21T16:34:14Z-
dc.date.available2024-01-21T16:34:14Z-
dc.date.created2022-01-10-
dc.date.issued1998-11-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/142759-
dc.title우주항공분야의 초소형 정밀기계-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitation전자부품 = The Electronic Parts & Components Monthly, pp.144 - 152-
dc.citation.title전자부품 = The Electronic Parts & Components Monthly-
dc.citation.startPage144-
dc.citation.endPage152-
dc.subject.keywordAuthorMEMS-
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