DSpace at KISTKIST ArticleOthers

Full metadata record

DC Field Value Language
dc.contributor.author박흥우-
dc.contributor.author주병권-
dc.contributor.author박윤권-
dc.contributor.author박정호-
dc.contributor.author김철주-
dc.contributor.author염상섭-
dc.contributor.author서상희-
dc.contributor.author오명환-
dc.date.accessioned2024-01-21T16:37:38Z-
dc.date.available2024-01-21T16:37:38Z-
dc.date.created2022-01-10-
dc.date.issued1998-10-
dc.identifier.issn1229-7607-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/142818-
dc.publisher한국전기전자재료학회-
dc.titleSi micromachining for MEMS-IR sensor application-
dc.title.alternative결정의존성 식각/기판접합을 이용한 MEMS용 구조물의 제작-
dc.typeArticle-
dc.description.journalClass2-
dc.identifier.bibliographicCitationTEEM (한국전기전자재료학회), v.11, no.10, pp.815 - 819-
dc.citation.titleTEEM (한국전기전자재료학회)-
dc.citation.volume11-
dc.citation.number10-
dc.citation.startPage815-
dc.citation.endPage819-
dc.subject.keywordAuthorfield emission-
dc.subject.keywordAuthorMEMS-
dc.subject.keywordAuthorwafer direct bonding-
dc.subject.keywordAuthororientation dependent etching-
dc.subject.keywordAuthorPbTiO3(PTO) layer-
dc.subject.keywordAuthorIR sensor-
dc.subject.keywordAuthorsol-gel-
Appears in Collections:
KIST Article > Others
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML
Show Simple Item Record

qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE