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dc.contributor.author조정-
dc.contributor.author조준식-
dc.contributor.author윤기현-
dc.contributor.author김현주-
dc.contributor.author최원국-
dc.contributor.author정형진-
dc.contributor.author고석근-
dc.date.accessioned2024-01-21T16:43:30Z-
dc.date.available2024-01-21T16:43:30Z-
dc.date.created2022-01-10-
dc.date.issued1998-08-
dc.identifier.issn1229-7801-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/142918-
dc.publisher한국세라믹학회-
dc.titleThe sensitivity of ultra thin pd-doped SnO2 gas sensor fabricated by ion-assisted deposition for methane gas-
dc.title.alternative이온빔 보조증착법을 이용하여 제작된 SnO2 에 초박막 Pd가 첨가된 박막형 가스센서의 메탄가스 감지 특성-
dc.typeArticle-
dc.description.journalClass2-
dc.identifier.bibliographicCitation한국세라믹학회지 = Journal of the Korean Ceramic Society, v.35, no.8, pp.795 - 800-
dc.citation.title한국세라믹학회지 = Journal of the Korean Ceramic Society-
dc.citation.volume35-
dc.citation.number8-
dc.citation.startPage795-
dc.citation.endPage800-
dc.subject.keywordAuthorSnO2 thin film-
dc.subject.keywordAuthorreactive ion-assisted deposition-
dc.subject.keywordAuthorultra-thin Pd layer-
dc.subject.keywordAuthorIon beam sputtering-
dc.subject.keywordAuthorspill-over-
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