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dc.contributor.author주병권-
dc.contributor.author이덕중-
dc.contributor.author이윤희-
dc.contributor.author이남양-
dc.contributor.author한정인-
dc.contributor.author조경익-
dc.contributor.author오명환-
dc.date.accessioned2024-01-21T16:43:54Z-
dc.date.available2024-01-21T16:43:54Z-
dc.date.created2022-01-10-
dc.date.issued1998-08-
dc.identifier.issn0254-4172-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/142925-
dc.publisher大韓電氣學會-
dc.titleImprovement of bonding properties by pre-bonding at room temperature in Si-glass electrostatic bonding process-
dc.title.alternative실리콘 - 유리 정전 열 접합에 있어서 상온 예비 접합에 의한 접합 특성의 개선-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitation전기학회논문지 = Transactions of the Korean Institute of Electrical Engneers, v.47, no.8, pp.1269 - 1276-
dc.citation.title전기학회논문지 = Transactions of the Korean Institute of Electrical Engneers-
dc.citation.volume47-
dc.citation.number8-
dc.citation.startPage1269-
dc.citation.endPage1276-
dc.subject.keywordAuthormodified electrostatic bonding-
dc.subject.keywordAuthorhydrophilization-
dc.subject.keywordAuthorinitial Van der Waals bonding-
dc.subject.keywordAuthorstabilization-
dc.subject.keywordAuthorSi-glass bonding-
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