Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 윤진국 | - |
dc.contributor.author | 정병성 | - |
dc.contributor.author | 고흥석 | - |
dc.contributor.author | 김재수 | - |
dc.contributor.author | 최종술 | - |
dc.date.accessioned | 2024-01-21T16:46:07Z | - |
dc.date.available | 2024-01-21T16:46:07Z | - |
dc.date.created | 2022-01-10 | - |
dc.date.issued | 1998-07 | - |
dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/142962 | - |
dc.publisher | 대한금속학회 | - |
dc.title | A study on the chemical vapor deposition of Si on Mo substrate | - |
dc.title.alternative | Mo 기판에서 Si의 화학증착에 관한 연구 | - |
dc.type | Article | - |
dc.description.journalClass | 3 | - |
dc.identifier.bibliographicCitation | 대한금속학회지, v.v. 36, no.no. 7, pp.1123 - 1130 | - |
dc.citation.title | 대한금속학회지 | - |
dc.citation.volume | v. 36 | - |
dc.citation.number | no. 7 | - |
dc.citation.startPage | 1123 | - |
dc.citation.endPage | 1130 | - |
dc.subject.keywordAuthor | molybdenum | - |
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