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dc.contributor.author윤진국-
dc.contributor.author정병성-
dc.contributor.author고흥석-
dc.contributor.author김재수-
dc.contributor.author최종술-
dc.date.accessioned2024-01-21T16:46:07Z-
dc.date.available2024-01-21T16:46:07Z-
dc.date.created2022-01-10-
dc.date.issued1998-07-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/142962-
dc.publisher대한금속학회-
dc.titleA study on the chemical vapor deposition of Si on Mo substrate-
dc.title.alternativeMo 기판에서 Si의 화학증착에 관한 연구-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitation대한금속학회지, v.v. 36, no.no. 7, pp.1123 - 1130-
dc.citation.title대한금속학회지-
dc.citation.volumev. 36-
dc.citation.numberno. 7-
dc.citation.startPage1123-
dc.citation.endPage1130-
dc.subject.keywordAuthormolybdenum-
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