Localization of quantum dots by using a patterned gallium oxide mask layer

Other Titles
패턴된 갈륨산화막 마스크를 이용한 양자점의 국소화
Authors
박용주한철구장영준오치성정석구고동완김광무김은규민석기
Issue Date
1998-07
Citation
응용물리, v.11, no.4, pp.492 - 497
Keywords
IngaAs 양자점; 산화막 마스크; 선택성장; migration; 전자선 리소그라피
URI
https://pubs.kist.re.kr/handle/201004/142967
Appears in Collections:
KIST Article > Others
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