DSpace at KIST: Electrostatic bonding between Si and ITO-coated #7059 glass substrates

Full metadata record

DC Field	Value	Language
dc.contributor.author	주병권	-
dc.contributor.author	정회환	-
dc.contributor.author	김영조	-
dc.contributor.author	한정인	-
dc.contributor.author	조경익	-
dc.contributor.author	오명환	-
dc.date.accessioned	2024-01-21T17:07:38Z	-
dc.date.available	2024-01-21T17:07:38Z	-
dc.date.created	2022-01-10	-
dc.date.issued	1998-05	-
dc.identifier.issn	1225-5475	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/143091	-
dc.publisher	한국센서학회	-
dc.title	Electrostatic bonding between Si and ITO-coated #7059 glass substrates	-
dc.title.alternative	실리콘 기판과 ITO가 코팅된 #7059 유리 기판간의 정전 열 접합	-
dc.type	Article	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	센서학회지, v.7, no.3, pp.211 - 218	-
dc.citation.title	센서학회지	-
dc.citation.volume	7	-
dc.citation.number	3	-
dc.citation.startPage	211	-
dc.citation.endPage	218	-
dc.subject.keywordAuthor	MEMS	-

Show Simple Item Record

KIST Library Institutional Repository