Determination of the neutral particles spatial distribution from intensity of plasma radiation

Abstract

The paper represents the results of the development and the evaluation of methods for determining the neutral particles spatial distribution on the basis of the spatial distribution of local radiation from a low-pressure plasma. In order to obtain local plasma radiation from the experimentally measured averaged according to the sight beam values, the regularization method was used. To show the possibilities for the regularization method, first the results of a mathematical simulation are presented; then: an evaluation of diagnostics methods for different plasma devices is given. The spatial distribution of atoms in a low-pressure Xe ion source with a solenoidal magnetic field and the dynamics of neutral components in gas mixtures under conditions of cataphoresis were studied using the developed methods.