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dc.contributor.authorJung, JH-
dc.contributor.authorJu, BK-
dc.contributor.authorKim, H-
dc.contributor.authorOh, MH-
dc.contributor.authorChung, SJ-
dc.contributor.authorJang, J-
dc.date.accessioned2024-01-21T17:15:37Z-
dc.date.available2024-01-21T17:15:37Z-
dc.date.created2021-09-03-
dc.date.issued1998-03-
dc.identifier.issn1071-1023-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/143228-
dc.description.abstractWe have studied the enhancement of field-emission characteristics by hydrogen-free nitrogen-doped diamondlike carbon (DLC) coating on Mo-tip field emitter arrays by a layer-by-layer technique using plasma-enhanced chemical vapor deposition. The Spindt-type molybdenum tip is used as an emission source without a resistive layer on the silicon substrate. The maximum emission current for each pixel was increased from 160 to 1520 mu A by a 20 nm N-doped DLC coating. Furthermore, the emission current from DLC-coated field emitter arrays (FEAs) is more stable than that of noncoated FEAs. (C) 1998 American Vacuum Society. [S0734-211X(98)07302-8].-
dc.languageEnglish-
dc.publisherAMER INST PHYSICS-
dc.titleEffect of N doping on the electron emission properties of diamondlike carbon film on a 2-in. Mo field emitter array panel-
dc.typeArticle-
dc.identifier.doi10.1116/1.589886-
dc.description.journalClass1-
dc.identifier.bibliographicCitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.16, no.2, pp.705 - 709-
dc.citation.titleJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B-
dc.citation.volume16-
dc.citation.number2-
dc.citation.startPage705-
dc.citation.endPage709-
dc.description.journalRegisteredClassscie-
dc.description.journalRegisteredClassscopus-
dc.identifier.wosid000073167200043-
dc.identifier.scopusid2-s2.0-0039098604-
dc.relation.journalWebOfScienceCategoryEngineering, Electrical & Electronic-
dc.relation.journalWebOfScienceCategoryNanoscience & Nanotechnology-
dc.relation.journalWebOfScienceCategoryPhysics, Applied-
dc.relation.journalResearchAreaEngineering-
dc.relation.journalResearchAreaScience & Technology - Other Topics-
dc.relation.journalResearchAreaPhysics-
dc.type.docTypeArticle; Proceedings Paper-
dc.subject.keywordAuthorfield emission-
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