Memory window of Pt/SrBi2Ta2O9/CeO2/SiO2/Si structure for metal ferroelectric insulator semiconductor field effect transistor

Abstract

We have proposed a Pt/SrBi2Ta2O9/CeO2/SiO2/Si structure for a ferroelectric gate of metal ferroelectric insulator field effect transistor. A memory window of the proposed ferroelectric gate increases as electric field applied to the SrBi2Ta2O9 layer increases, and the memory window of Pt/SrBi2Ta2O9/CeO2/SiO2/Si is relatively greater than that of Pt/SrBi2Ta2O9/SiO2/Si. As a result, the Pt/SrBi2Ta2O9(140 nm)/CeO2(25 nm)/SiO2/Si structure has sufficiently programmable memory windows from 0.9 to 2.5 V in the low gate voltage range of 4-7 V. (C) 1997 American Institute of Physics. [S0003-6951(97)01050-4].