DSpace at KISTKIST ArticleOthers

Full metadata record

DC Field Value Language
dc.contributor.authorKang, M-
dc.contributor.authorKim, J-
dc.contributor.authorLim, T-
dc.contributor.authorOh, I-
dc.contributor.authorJeon, B-
dc.contributor.authorJung, I-
dc.contributor.authorAn, C-
dc.date.accessioned2024-01-21T18:01:24Z-
dc.date.available2024-01-21T18:01:24Z-
dc.date.created2021-09-01-
dc.date.issued1997-11-
dc.identifier.issn0022-3093-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/143539-
dc.description.abstractThe optical and electrical properties before and after annealing of amorphous silicon films, deposited by electron cyclotron resonance plasma chemical vapor deposition as a function of substrate temperature, were investigated. The properties of non-annealed Si films were improved with increasing substrate temperature. On the other hand, Hall mobility of annealed Si films decreased with increasing substrate temperature. (C) 1997 Published by Elsevier Science B.V.-
dc.languageEnglish-
dc.publisherELSEVIER SCIENCE BV-
dc.titleThe characteristics before and after annealing of amorphous silicon films prepared by ECR plasma CVD-
dc.typeArticle-
dc.identifier.doi10.1016/S0022-3093(97)00424-9-
dc.description.journalClass1-
dc.identifier.bibliographicCitationJOURNAL OF NON-CRYSTALLINE SOLIDS, v.221, no.1, pp.103 - 105-
dc.citation.titleJOURNAL OF NON-CRYSTALLINE SOLIDS-
dc.citation.volume221-
dc.citation.number1-
dc.citation.startPage103-
dc.citation.endPage105-
dc.description.journalRegisteredClassscie-
dc.description.journalRegisteredClassscopus-
dc.identifier.wosidA1997YH78400013-
dc.identifier.scopusid2-s2.0-0031549768-
dc.relation.journalWebOfScienceCategoryMaterials Science, Ceramics-
dc.relation.journalWebOfScienceCategoryMaterials Science, Multidisciplinary-
dc.relation.journalResearchAreaMaterials Science-
dc.type.docTypeLetter-
dc.subject.keywordAuthorECR CVD-
dc.subject.keywordAuthora-Si:H film-
dc.subject.keywordAuthorannealing-
dc.subject.keywordAuthorpoly silicon-
Appears in Collections:
KIST Article > Others
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML
Show Simple Item Record

qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE