Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김용태 | - |
| dc.contributor.author | 김동준 | - |
| dc.contributor.author | 이창우 | - |
| dc.contributor.author | 박종완 | - |
| dc.date.accessioned | 2024-01-21T18:02:40Z | - |
| dc.date.available | 2024-01-21T18:02:40Z | - |
| dc.date.created | 2022-01-10 | - |
| dc.date.issued | 1997-10 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/143561 | - |
| dc.title | Thermal stabilities of PECVD W-B-N thin films as a diffusion barrier. | - |
| dc.type | Article | - |
| dc.description.journalClass | 3 | - |
| dc.identifier.bibliographicCitation | Multilevel interconnect technology (SPIE)., v.v. 3214, pp.48 - 56 | - |
| dc.citation.title | Multilevel interconnect technology (SPIE). | - |
| dc.citation.volume | v. 3214 | - |
| dc.citation.startPage | 48 | - |
| dc.citation.endPage | 56 | - |
| dc.subject.keywordAuthor | thermal stability | - |
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