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dc.contributor.author고석근-
dc.contributor.author조준식-
dc.contributor.author최원국-
dc.contributor.authorK. H. Kim-
dc.contributor.authorS. C. Choi-
dc.contributor.authorY. S. Yoon-
dc.contributor.author정형진-
dc.date.accessioned2024-01-21T18:02:54Z-
dc.date.available2024-01-21T18:02:54Z-
dc.date.created2022-01-10-
dc.date.issued1997-10-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/143565-
dc.titleIon beam and its applications-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitation한국진공학회지 ., v.6, no.S1, pp.110 - 114-
dc.citation.title한국진공학회지 .-
dc.citation.volume6-
dc.citation.numberS1-
dc.citation.startPage110-
dc.citation.endPage114-
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