DSpace at KIST: Laser direct etching of Al//0//.//3Ga//0//.//7As/GaAs multilayer structures.

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DC Field	Value	Language
dc.contributor.author	박세기	-
dc.contributor.author	민병돈	-
dc.contributor.author	김성일	-
dc.contributor.author	김은규	-
dc.contributor.author	민석기	-
dc.contributor.author	이천	-
dc.contributor.author	안병성	-
dc.date.accessioned	2024-01-21T18:31:08Z	-
dc.date.available	2024-01-21T18:31:08Z	-
dc.date.created	2022-01-10	-
dc.date.issued	1997-05	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/143809	-
dc.title	Laser direct etching of Al//0//.//3Ga//0//.//7As/GaAs multilayer structures.	-
dc.title.alternative	Al//0//.//3Ga//0//.//7As/GaAs 다층구조의 레이저 직접 에칭 =	-
dc.type	Article	-
dc.description.journalClass	3	-
dc.identifier.bibliographicCitation	응용물리 = The Korean physical society, v.v. 10, no.no. 3, pp.266 - 271	-
dc.citation.title	응용물리 = The Korean physical society	-
dc.citation.volume	v. 10	-
dc.citation.number	no. 3	-
dc.citation.startPage	266	-
dc.citation.endPage	271	-
dc.subject.keywordAuthor	알곤이온 레이저	-

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