DSpace at KIST: Structure and mechanical properties of nitrogenated diamond-like carbon films deposited by RF-PACVD

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DC Field	Value	Language
dc.contributor.author	이광렬	-
dc.contributor.author	은광용	-
dc.date.accessioned	2024-01-21T18:31:28Z	-
dc.date.available	2024-01-21T18:31:28Z	-
dc.date.created	2022-01-10	-
dc.date.issued	1997-05	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/143815	-
dc.title	Structure and mechanical properties of nitrogenated diamond-like carbon films deposited by RF-PACVD	-
dc.title.alternative	RF 플라즈마 CVD에 의해 합성된 질소 함유 다이아몬드성 카본필름의 구조 및 기계적 특성	-
dc.type	Article	-
dc.description.journalClass	3	-
dc.identifier.bibliographicCitation	Journal of the Korean vacuum society., v.6, no.2, pp.151 - 158	-
dc.citation.title	Journal of the Korean vacuum society.	-
dc.citation.volume	6	-
dc.citation.number	2	-
dc.citation.startPage	151	-
dc.citation.endPage	158	-
dc.subject.keywordAuthor	다이아몬드상 카본 필름	-
dc.subject.keywordAuthor	내마모윤활특성	-

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