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dc.contributor.author박경현-
dc.contributor.author변영태-
dc.contributor.author김명욱-
dc.contributor.author김선호-
dc.contributor.author최상삼-
dc.contributor.author조욱래-
dc.contributor.author박승한-
dc.contributor.author김웅-
dc.date.accessioned2024-01-21T18:34:43Z-
dc.date.available2024-01-21T18:34:43Z-
dc.date.created2021-09-13-
dc.date.issued1997-04-
dc.identifier.issn1225-6285-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/143871-
dc.languageKorean-
dc.publisher한국광학회-
dc.title광도파로 소자 제작을 위한 레이저 리소그래피 장치-
dc.title.alternativeLaser lithography system for the fabrication of optical waveguides-
dc.typeArticle-
dc.description.journalClass2-
dc.identifier.bibliographicCitation한국광학회지, v.8, no.2, pp.169 - 173-
dc.citation.title한국광학회지-
dc.citation.volume8-
dc.citation.number2-
dc.citation.startPage169-
dc.citation.endPage173-
dc.description.isOpenAccessN-
dc.description.journalRegisteredClasskci-
dc.subject.keywordAuthor광도파로-
dc.subject.keywordAuthor광소자-
dc.subject.keywordAuthor레이저 리소그래피-
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