Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 백영준 | - |
dc.contributor.author | 박범수 | - |
dc.contributor.author | 은광용 | - |
dc.date.accessioned | 2024-01-21T18:37:08Z | - |
dc.date.available | 2024-01-21T18:37:08Z | - |
dc.date.created | 2022-01-10 | - |
dc.date.issued | 1997-03 | - |
dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/143913 | - |
dc.title | BCl ₃ -NH ₃계의 플라즈마 화학증착공정을 이용한 질화붕소막의 합성 | - |
dc.type | Article | - |
dc.description.journalClass | 3 | - |
dc.identifier.bibliographicCitation | Journal of the Korean ceramic society., v.34, no.3, pp.249 - 256 | - |
dc.citation.title | Journal of the Korean ceramic society. | - |
dc.citation.volume | 34 | - |
dc.citation.number | 3 | - |
dc.citation.startPage | 249 | - |
dc.citation.endPage | 256 | - |
dc.subject.keywordAuthor | 질화붕소 | - |
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