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dc.contributor.author백영준-
dc.contributor.author박범수-
dc.contributor.author은광용-
dc.date.accessioned2024-01-21T18:37:08Z-
dc.date.available2024-01-21T18:37:08Z-
dc.date.created2022-01-10-
dc.date.issued1997-03-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/143913-
dc.titleBCl ₃ -NH ₃계의 플라즈마 화학증착공정을 이용한 질화붕소막의 합성-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitationJournal of the Korean ceramic society., v.34, no.3, pp.249 - 256-
dc.citation.titleJournal of the Korean ceramic society.-
dc.citation.volume34-
dc.citation.number3-
dc.citation.startPage249-
dc.citation.endPage256-
dc.subject.keywordAuthor질화붕소-
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